| (CVD boat reactor) The following table gives the range of typical parameter values for the boat reactor. | ||
|
|
| (a) Determine the effect of each of the parameter values in the cases A, B, and C on the thickness and curvature. | ||
|
||
| The following parameter values are the same for all three cases. | ||
|
||
| (b) Vary other parameters and describe your findings. |
[2nd Ed. P11-20]