P5-12B
Microelectronic devices are formed by first forming SiO2 on a silicon wafer by chemical vapor deposition. This procedure is followed by coating the SiO2 with a polymer called a photoresist. The pattern of the electronic circuit is then placed on the polymer and the sample is irradiated with ultraviolet light. If the polymer is a positive photoresist, the sections that were irradiated will dissolve in the appropriate solvent and those sections not irradiated will protect the SiO2 from further treatment. The wafer is then exposed to strong acids, such as HF, which etch (i.e., dissolve) the exposed SiO2. It is extremely important to know the kinetics of the reaction so that the proper depth of the channel can be achieved. The dissolution reaction is

P5-12B Solution